Grein Research has acquired a new sputtering system from Polyteknik AS. The system has three 4 inch magnetrons and is capable of coating wafers up to four inches in diameter or objects of comparable size. The system has a fast turnaround time due to its ease of opening and the fast changing of magnetron targets. It is ideally suited to fast deposition of metallic coatings and amorphous alloys as well as low-to-intermediate temperature deposition of nitrides and oxides.
The system is a welcome addition to the ultrahigh vacuum deposition chambers already in place at the University of Iceland Nanotechnology Centre.