Coatings

Available coatings

We can deposit thin films and multilayers from sub-nm thicknesses up to several micrometers on up to four inch wafers (or objects of comparable size). Available materials include:

• Pure metals, such as Al, Ti, or Pt
• Amorphous metal alloys, such as AlZr or CoZr
• Complex alloys or compounds, such as Ti₂AlC or Cr₂GeC
• Metal nitrides, such as TiN or ZrN
• Oxides, such as TiO₂ or SiO₂

To apply the coatings we have a range of deposition techniques at our disposal such as dc, rf and pulsed-dc magnetron sputtering, cathodic arc deposition and electron-beam evaporation.